工位数
Number operating positions |
10 |
预江南(中国)室数
Number of fore-vacuum chamber |
2 |
工作室极限压力(Pa)
Ultimate pressure of chamber |
6×10-1 |
预江南(中国)室极限压力(Pa)
Ultimate pressure of fore-vacuum chamber |
2.6×103 |
各工作室抽气速率(L/S)
Pumping speed of each chamber |
2 |
泵转速(r/min)
Rotational speed of pump |
500 |
用油量(L)
Consumption of oil |
12 |
电机功率(Kw)
Motor power |
1.5 |